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Mechanical properties and oxidation resistance of chemically vapor deposited TiSiN nanocomposite coating with thermodynamically designed compositions

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成果类型:
期刊论文
作者:
Qiu, Lianchang;Du, Yong*;Wang, Shaoqing;Li, Kai*;Yin, Lei;Wu, Liying;Zhong, Zhiqiang;Albir, Layyous
通讯作者:
Du, Yong;Li, Kai
作者机构:
[Li, Kai; Qiu, Lianchang; Zhong, Zhiqiang; Du, Yong; Wu, Liying] Cent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China.
[Albir, Layyous] Layyous Consulting Ltd, IL-25140 Miilya, Israel.
[Wang, Shaoqing] Shijiazhuang Tiedao Univ, Sch Mat Sci & Engn, Shijiazhuang 050043, Hebei, Peoples R China.
[Yin, Lei] Ganzhou Achteck Tool Technol Co Ltd, Ganzhou 341000, Jiangxi, Peoples R China.
通讯机构:
[Du, Yong; Li, Kai] Cent S Univ, State Key Lab Powder Met, Changsha 410083, Hunan, Peoples R China.
语种:
英文
关键词:
Chemical vapor deposition;TiSiN coating;Thermodynamic calculation;Hardness;Oxidation resistance
期刊:
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
ISSN:
0263-4368
年:
2019
卷:
80
页码:
30-39
文献类别:
WOS:Article
所属学科:
WOS学科类别:Materials Science, Multidisciplinary;Metallurgy & Metallurgical Engineering
入藏号:
基金类别:
National Natural Science Foundation of China [51371199]; Key R&D program of Science and Technology Department of Jiangxi Province in China [2018ACH80001]
机构署名:
本校为第一且通讯机构
院系归属:
粉末冶金研究院
摘要:
TiSiN coating with nanocrystallite surrounded by amorphous phase has attracted a broad interest because of its high hardness and excellent oxidation resistance desired for cutting tools. In the present work, TiSiN coatings were designed and prepared from a gaseous mixture of TiCl4, SiCl4, NH3 and H-2 by low pressure chemical vapor deposition (CVD) process under the guidance of calculated CVD phase diagrams. The calculated compositions and phases in the deposited coatings agree well with the experimental ones. The deposited TiSiN coatings consist of nano-crystalline TiN and amorphous Si3N4 (a-Si3N4). A maximum hardness of about 2800 HV0.02 was obtained, corresponding to a minimum crystallite size of 17.7 nm and a-Si3N4 volume fraction of 13.3% for TiSiN coating deposited at 1123 K under 3.0 KPa. After oxidation at 973 K for 1 h, TiSiN coating kept intact while TiN was completely oxidized. TiSiN nanocomposite coating formed by Si incorporation to TiN displayed superior hardness and oxidation resistance in comparison with those of TiN. The correlation of TiSiN coating hardness with volume fraction of a-Si3N4 and TiN grain size was discussed. The present work demonstrates a novel strategy of thermodynamic calculations and key experiments to deposit CVD TiSiN coatings highly efficiently, which is equally valid for the design of other CVD hard coatings.
参考文献:
ANDERSON PM, 1995, NANOSTRUCT MATER, V5, P349, DOI 10.1016/0965-9773(95)00250-I
Andersson JO, 2002, CALPHAD, V26, P273, DOI 10.1016/S0364-5916(02)00037-8
Bartosik M, 2018, INT J REFRACT MET H, V72, P78, DOI 10.1016/j.ijrmhm.2017.12.015
Bouzakis KD, 2013, SURF COAT TECH, V237, P379, DOI 10.1016/j.surfcoat.2013.06.044
Chase Jr M. W., 1998, J PHYS CHEM REF DATA, V9

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